AIP Digital Archive
Electrical Engineering, Measurement and Control Technology
The MEVVA ion source presented in the present paper adopts the arc discharge mechanism with a cathode changeable by a motor for pushing in, and an accel–decel three-grid extraction system. The voltage proof level is higher than 60 kV, the ion source generally runs at a voltage of 40 kV, the average beam current is higher than 5 mA, the beam spot is about 150 mm in diameter, and the nonuniformity of beams is within ±20%. Measurements of the beam radial profile show that there is a platform of about 40 mm in diameter in the central region. Ion beams and their optimal operation conditions for the cathode materials Al, Ti, Cr, Fe, Ni, Cu, Y, Zr, Mo, Ta, W, C, LaB6, etc., have already been obtained.
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