ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An investigation to reduce the energy of the solid ion beam extracted from electron beam evaporation ion source for material modifications has been performed. The preliminary results have shown that the beam energy can be reduced to lower than 100 eV by a specially designed extraction system for carbon and nitrogen mixed ion beams. The beam current extracted is up to 30 mA for a small 20 mm extraction diameter ion source. It has been found that the extraction energy can be controlled by adjusting the bias voltage of the sample used for coating and the crucible potential. The extraction capability and the composition of the ion beam can also be controlled by changing the gas flow rate and the input power of the ion source. For carbon nitride films synthesized at low energy by this system, the results have shown to exhibit very high hardness values. The microhardness is over HK 6000 kg/mm2. The principle of this ion source is described. The structure of the ion source, and the experimental results are also described in this article. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148992
