ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We describe a novel variable (cryogenic) temperature near-field scanning optical microscope (VT-NSOM) designed specifically for submicron imaging of materials and devices over a temperature range of 12–300 K. In high vacuum, we cool only the sample stage of the compact NSOM, thereby maintaining a large scan area (35 μm×35 μm) at low temperatures and enabling rapid (∼30 min) temperature changes. With incorporation into an external conventional optical microscope, the VT-NSOM is capable of imaging a single submicron feature over the entire temperature range. We demonstrate the performance of the instrument by examining the photoresponse of threading dislocation defects in relaxed GeSi films. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1149919
