Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
54 (1989), S. 1181-1182
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
An attempt to obtain soft magnetic materials with high saturation magnetic flux density and thermal stability has been carried out with respect to a multilayered type of films containing Fe-N prepared by two-source magnetron rf sputtering. The addition of small amounts of elements such as Al is effective in improving soft magnetic properties of Fe-N films. Multilayered films of Fe-Al-N intervened by thin Si-N layers showed softer magnetic properties than the Fe-Al-N single layer films and also showed high thermal stability. Typically, Fe-Al-N (500 A(ring))/Si-N (12 A(ring)) multilayered films exhibited a saturation magnetic flux density of 20 kG, a coercivity Hc of 0.3 Oe, and a permeability μ of 1900 at 5 MHz after annealing at 550 °C for 1 h.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.101561
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