ISSN:
1436-5073
Schlagwort(e):
depth profile analysis
;
surface roughness
;
SNMS
;
GDOS
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Chemie und Pharmazie
Notizen:
Abstract The influence of surface structure of technical materials on results and statements of surface analytical methods has been investigated. Especially surface roughness as a typical property of rolled products has been observed. For this purpose samples of steel (technical surface, roughness up to 5 μm) and silicon wafers (polished surface) have been analyzed by SNMS and GDOS in order to get information about changes of the surface roughness as function of the sputtering time and their influence on the statements about the depth profiles obtained.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF01244470
