Electronic Resource
Springer
Fresenius' journal of analytical chemistry
358 (1997), S. 77-79
ISSN:
1432-1130
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract A combined ultrahigh vacuum scanning tunneling-scanning electron microscope system is presented. This system allows to approach arbitrary locations on a sample within a range of 5 mm × 5 mm under electron microscopic control. The usefulness of this system is demonstrated by the characterization of a 1 μm wide photolithographically produced Ag microbridge on a Si(100) substrate.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s002160050349
|
Location |
Call Number |
Expected |
Availability |