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KOR negative photoresist in integrated optics (1975)

Righini, G. -C. ; Russo, V. ; Sottini, S.

Springer

Optical and quantum electronics 7 (1975), S. 447-450

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ISSN: 1572-817X

Source: Springer Online Journal Archives 1860-2000

Topics: Electrical Engineering, Measurement and Control Technology , Physics

Notes: Abstract Tests on Kodak Ortho Resist (KOR) have been made for application to integrated optics. This material is interesting with respect to other photoresists for its high sensitivity over a wide wavelength range. Optical waveguides and gratings have been realized with KOR. In particular gratings with high frequency have been used to test the possibility of air-film coupling via their evanescent diffracted waves.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF00619320

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