Publication Date:
2015-05-07
Description:
Author(s): Krishna Agarwal, Rui Chen, Lian Ser Koh, Colin J. R. Sheppard, and Xudong Chen A near-infrared microscopy technique can detect defects in electronic devices with a resolution better than the diffraction limit of light. [Phys. Rev. X 5, 021014] Published Wed May 06, 2015
Electronic ISSN:
2160-3308
Topics:
Physics