Publication Date:
2013-09-20
Description:
Maria Palmucci, Nikolay Britun, Stephanos Konstantinidis, and Rony Snyders The velocity distribution function of the sputtered particles in the direction parallel to the planar magnetron cathode is studied by spatially- and time-resolved laser-induced fluorescence spectroscopy in a short-duration (20 [mu]s) high-power impulse magnetron sputtering discharge. The experimenta ... [J. Appl. Phys. 114, 113302 (2013)] published Thu Sep 19, 2013.
Print ISSN:
0021-8979
Electronic ISSN:
1089-7550
Topics:
Physics