Publication Date:
2019
Description:
〈p〉Publication date: 15 November 2019〈/p〉
〈p〉〈b〉Source:〈/b〉 Journal of Alloys and Compounds, Volume 809〈/p〉
〈p〉Author(s): Honghong Zhang, Zeqing Li, Weifeng He, Chuansheng Ma, Bin Liao, Yinghong Li〈/p〉
〈div xml:lang="en"〉
〈h5〉Abstract〈/h5〉
〈div〉〈p〉For the purpose of optimizing the anti-impact performance of TiN film, a series of TiN films with different N/Ti ratios were investigated. The phase evolution and mechanical properties of TiN films were explored. In particular, the cyclic nano-impact tests with impact energy ranging from 0.1 μJ to 0.9 μJ were conducted to evaluate the anti-impact performance of TiN films. It was found that the non-stoichiometric phases of TiN〈sub〉0.30〈/sub〉, Ti〈sub〉2〈/sub〉N and TiN〈sub〉0.61〈/sub〉 reduced with increasing N/Ti ratio in TiN films. The hardness of film increased with increasing stoichiometric TiN phase in films, while as an indicator of toughness, the H〈sup〉3〈/sup〉/E〈sup〉2〈/sup〉 ratio decreased. The anti-impact performance of TiN films displayed a close relationship with both hardness and H〈sup〉3〈/sup〉/E〈sup〉2〈/sup〉 ratio, in which a high enough hardness was the prerequisite of outstanding impact resistance, and H〈sup〉3〈/sup〉/E〈sup〉2〈/sup〉 ratio was an important factor affecting the damage mechanism. As the H〈sup〉3〈/sup〉/E〈sup〉2〈/sup〉 ratio decreased, the damage mechanism of TiN film transformed gradually from plastic fatigue damage to brittle fracture failure. Especially, the TiN film featuring N/Ti ratio of 0.780 (TiN-16) was not only hard enough to resist penetration, but also tough enough to prevent the film from fracturing, thus it exhibited the best comprehensive anti-impact performance.〈/p〉〈/div〉
〈/div〉
Print ISSN:
0925-8388
Electronic ISSN:
1873-4669
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
