Publication Date:
2018
Description:
Abstract
Recently, lead‐free piezoelectric thin films have received increasing attention due to the growing demands for mircoelectromechanical systems and the significant progress in lead‐free piezoelectric research. Here, potassium sodium niobate [(K, Na)NbO3 (KNN)]‐based thin films were fabricated via a sol‐gel method. The effects of pyrolysis temperature on the resulting microstructure and electrical properties of KNN‐based films were investigated. The KNN‐based film pyrolyzed at 550°C and annealed at 700°C shows a dominant (100) orientation with a high texturing degree of 91.7%. The microstructures, morphologies, piezo‐ and ferroelectric properties of the KNN‐based films were discussed in association with different pyrolysis temperatures. The crystallization mechanism of the (100) textured KNN‐based thin films was elaborated in detail.
Print ISSN:
0002-7820
Electronic ISSN:
1551-2916
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
