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Miniature micromachined quadrupole mass spectrometer array and method of making the same (2000)

Rice, John T. ; Chutjian, Ara ; Fuerstenau, Stephen D. ; [et al.]

In: CASI

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Publication Date: 2019-08-15

Description: The present invention provides a quadrupole mass spectrometer and an ion filter, or pole array, for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

Keywords: Instrumentation and Photography

Format: application/pdf

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