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Phase-stepping fiber-optic projected fringe system for surface topography measurements (1992)

Beheim, Glenn ; Mercer, Carolyn R.

In: CASI

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Publication Date: 2019-06-28

Description: A projected fringe interferometer for measuring the topography of an object is presented. The interferometer periodically steps the phase angle between a pair of light beams emanating from a common source. The steps are pi/2 radians (90 deg) apart, and at each step a video image of the fringes is recorded and stored. Photodetectors measure either the phase and theta of the beams or 2(theta). Either of the measures can be used to control one of the light beams so that the 90 deg theta is accurately maintained. A camera, a computer, a phase controller, and a phase modulator established closed-loop control of theta. Measuring the phase map of a flat surface establishes a calibration reference.

Keywords: OPTICS

Format: application/pdf

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