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Growth and characterization of single crystal insulators on silicon (1989)

Fathauer, Robert W. ; Schowalter, Leo J.

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Publication Date: 2011-08-19

Description: An overview of the growth and characterization of epitaxial insulators on semiconductors is presented. The potential applications include semiconductor-on-insulator structures, three-dimensional and/or high-density integrated circuits, optoelectronic applications such as integrated waveguides and improved gate insulators. The growth and physical characterization of epitaxial fluorides on semiconductors are discussed. Consideration is also given to the epitaxial overgrowth of epitaxial metal layers with CaF2 as well as to the formation of a novel superlattice of Ca particles in epitaxial CaF2.

Keywords: SOLID-STATE PHYSICS

Type: Critical Reviews in Solid State and Materials Sciences (ISSN 1040-8436); 15; 4, 19

Format: text

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