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    Convenient mounting method for electrical measurements of thin samples (1986)
    In:  Other Sources
    Details
    Publication Date: 2011-08-19
    Description: A method for mounting thin samples for electrical measurements is described. The technique is based on a vacuum chuck concept in which the vacuum chuck simultaneously holds the sample and established electrical contact. The mounting plate is composed of a glass-ceramic insulating material and the surfaces of the plate and vacuum chuck are polished. The operation of the vacuum chuck is examined. The contacts on the sample and mounting plate, which are sputter-deposited through metal masks, are analyzed. The mounting method was utilized for van der Pauw measurements.
    Keywords: ELECTRONICS AND ELECTRICAL ENGINEERING
    Type: Review of Scientific Instruments (ISSN 0034-6748); 57; 1437
    Format: text
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