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Air-bridge microbolometer for far-infrared detection (1984)

Rutledge, D. B. ; Neikirk, D. P.

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Publication Date: 2019-06-28

Description: A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate, a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power 28 pW/sq rt Hz. A thermal model is also presented that accurately fits the response of the detector.

Keywords: INSTRUMENTATION AND PHOTOGRAPHY

Type: Applied Physics Letters (ISSN 0003-6951); 44; 153-155

Format: text

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