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Geometry and properties of the plasma in a quadrupole ion pump (1977)

Schwarz, H.

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Publication Date: 2019-06-27

Description: The diameter of the plasma in a quadrupole ionization gauge and quadrupole ion pump has been measured as a function of pressure. The radio-frequency quadrupole systems are tuned in such a way that electrons remain on stable trajectories in the center of the tube. Being emitted at one end, the electrons encounter an inverted field at the other end so that they travel on spiral paths back and forth until they collide with the rest gas molecules, producing ions which are collected as an ion current at a cylinder surrounding the four hyperbolically shaped quadrupole electrodes.

Keywords: INSTRUMENTATION AND PHOTOGRAPHY

Type: Journal of Vacuum Science and Technology; 14; Mar

Format: text

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