ISSN:
1551-2916
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Boron-rich boron nitride (BN) films have been prepared on Si and SiO2/Si substrates by the vacuum pyrolysis of spin-coated polyborazine films. Physical properties of the prepared films such as film strength, thermal conductivity, and dielectrics were determined. The BN films vacuum-pyrolyzed at 900°C showed residual N–H bonds with a 0.75 N/B ratio, interdiffusion phenomena, and preferred orientation at the interfacial zone. Hardness and the elastic modulus of the film increased to 1.6 GPa and 50 GPa by nanoindentation loading. It had a thermal conductivity of 134 W/(m·K) at 296.5 K, and a dielectric constant in the range of 5–7, with tan ∂ between 0.01 and 0.47, depending on the film thickness.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1151-2916.2000.tb01615.x
