ISSN:
1551-2916
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
BaTiO3 thin films were processed hydrothermally on Ag-coated quartz substrates at 90°C by reacting films of titanium dimethoxy dineodecanoate (TDD) in aqueous solutions of Ba(OH)2. Two reaction sequences were used: either the TDD was reacted directly in aqueous Ba(OH)2, or the TDD was first pyrolyzed in air at temperatures ranging from 200° to 500°C before hydrothermal reaction. Depending on the processing conditions, the dielectric constant of the thin films ranged from 5 to 170, the dielectric constant increasing with increasing pyrolysis temperature. Thin film porosimetry data suggest that the improvement in film dielectric performance is related to decreases in thin film residual porosity after hydrothermal reaction.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1151-2916.2000.tb01216.x
