Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Advances in science and technology
Vol. 54 (Sept. 2008), p. 434-438
ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
This research addresses the fabrication of crack-free 40-nm thin film YBa2Cu3O7 (YBCO) pixelstructures based on high temperature superconductor (HTSC) microbolometers for highly sensitivethermal detectors that can be miniaturized for affordable passive millimeter-wave (MMW) imaging.A completely dry etch process is described for suspended transition edge bolometers by removing(releasing) the silicon substrate underneath a 3 micrometer wide pixel using gaseous plasmasulfurhexafluoride (SF6) chemical reaction. This is an improvement over conventional selective wetchemical etching techniques that are both harsh on the YBCO and require additional complexalignment steps to the substrate material leading to very poor device yields and performance. Issuesrelating to material roughness, etch redeposition, and silicon undercutting will be analyzed andmethodologies to overcome/minimize such problems will be explained in detail
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.54.434.pdf
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