ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This paper discusses a smart temperature sensor system that comprises of a highperformance quartz tuning fork temperature sensor, interface with CMOS circuitry and controlalgorithm for reconfiguration. The ideal thermo-sensitive cut for quartz tuning fork resonators isanalyzed with the theory, and is optimized by FEM (Finite Element Method). The specific cut quartztuning fork was fabricated using photolithography and the etching technology. And the tuning forksensing element (4 3 2 . 0 1 mm × × ) is so small that can be housed in the capsule ( 6 2× Φ mm). The smarttemperature sensor along with the interface IC to FPGA and special control algorithm may easilyrealize the sensor reconfiguration and the auto-calibration in the field. The experimental resultindicates that the sensitivity of this sensor can reach C ppm o / 65 in the temperature range from-20 to140 C o , it guarantees that precision is C o 01 . 0 , the resolution is C o 001 . 0 , and the response time is 1s
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/41/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.47-50.769.pdf
