ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Si-based high-temperature ceramics are attractive materials for powermicroelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si3N4 ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si3N4 3-dimensional microfabrication because it combines themachinablity of pre-sintered Si powder compacts and near-net shaping characteristic of S3N4 reaction sintering. Si3N4 micro-components such as micro nozzle arrays and micro-rotor were fabricated by using the present process
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/49/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.287.28.pdf
