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Scanning x-ray microscopy using a laser-plasma source (1993)

Michette, A. G. ; Turcu, I. C. E. ; Schulz, M. S. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 64 (1993), S. 1478-1482

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: Previously high-resolution soft x-ray microscopy has only been possible with synchrotron sources. Here, the first successful attempts at using a scanning transmission x-ray microscope with a laser-plasma source are reported. Spatial resolutions were limited to about 650 nm by electrical noise in the detector, but single shot per pixel images were obtained of test and real specimens. The microscope was not optimized to the source since it was designed for use on the undulator beam line of a synchrotron. With an improved system, it is demonstrated that single shot per pixel imaging at high resolution (better than 50 nm) will routinely be possible.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1144067

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