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Micromachined infrared sensors using tunneling displacement transducers (1996)

Kenny, T. W. ; Reynolds, J. K. ; Podosek, J. A. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 67 (1996), S. 112-128

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: Uncooled infrared sensors are important for a number of technological and scientific measurements. We have designed, built, and tested a new uncooled infrared sensor which is made by silicon micromachining. This infrared sensor uses a tunneling displacement transducer to detect the thermal expansion of a small volume of trapped gas. Prototype devices based on this design have been operated with NEP better than 3×10−10 W/(square root of)Hz at 25 Hz, which is competitive with the best comparably sized uncooled sensors available. This article will describe the design, fabrication, and operation of all elements of this sensor. © 1996 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1146559

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