ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A vacuum gauge has been designed and fabricated using a new type of sensor element, the semiconducting barium titanate positive temperature coefficient (PTC) thermistor. It covers a much wider range and better resolution compared to conventional Pirani gauge and other thermistor vacuum gauges particularly in the low vacuum levels due to its extreme high temperature coefficient. The details of design criteria of the instrument and its performance characteristics have been discussed. Due to the unique autocurrent limiting and stabilizing capabilities of a PTC thermistor, the fabrication of the instrument appears to be much cheaper. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1287619