Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
72 (2001), S. 4312-4314
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Langmuir probe analysis of a sputtering glow discharge leads to errors in measurements due to contamination of the probe surface by the sputter deposition from the target. An automatic Langmuir probe system using a personal computer has been designed. The design details and performance evaluation of this system are discussed in this article. © 2001 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1412855
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