ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Defects produced in lightly doped crystalline silicon by 1-MeV electrons and 14-MeV neutrons are studied. Deep level transient spectroscopy (DLTS) and Hall voltage measurements have been used for investigating the energy depth, nature, and density of radiation-induced defects. The extent of damage caused by 14-MeV neutrons is found to be comparatively high as inferred from the continuous distribution of gap states in the DLTS measurement. Identical defects were observed in both cases where the A-center (Ec−0.17 eV), E-center (Ec−0.39 eV), and divacancy (Ec−0.23 eV) were prominent. An additional defect level (Ec−0.86 eV) was observed from DLTS for neutron-irradiated samples.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.349581