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    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 71 (1992), S. 542-544 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Thin alloy films of Pd and Ni (8%〈Ni〈20% in at. %) formed by dual-electron-beam evaporation techniques have been found to give durable and quickly reversible detectors of high H2 concentrations (pH2 0.1%–100%, 0.7–700 Torr) near 1 atm and 300 K, including accurate determinations of pH2 around the lower explosive limit of 4% in air. The addition of Ni suppresses the α to β phase transition found in pure Pd under these conditions. The measurement of resistivity changes in the thin films along with flatband shifts of metal-oxide-semiconductor capacitors on the same Si wafer gives accurate values of pH2 over more than six decades.
    Type of Medium: Electronic Resource
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