ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Fe/Al multilayers have been prepared by the ion beam sputtering method with use of Ar and Kr as the working gas. Sputtering by Kr ion beam deposited the multilayer with better crystallinity, smaller interdiffusion between layers, and lower electrical resistivity than sputtering by Ar ion beam. Multilayers with thicknesses of Fe and Al layers of 50–120 A(ring) and 15–20 A(ring), respectively, possessed excellent soft magnetism. Such soft magnetism seems to be related, in part, to the fine granulation in Fe layers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.352627