ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The radio-frequency plasma-assisted molecular beam epitaxy of cubic AlyGa1−yN/GaN heterostructures on GaAs(001) substrates is reported. Rutherford backscattering spectroscopy, high resolution x-ray diffraction, and first-order micro-Raman spectroscopy measurements were used to characterize the structural and vibrational properties of the alloy epilayers. The Al content of the alloy is in the range from 0.07〈x〈0.20. X-ray diffraction reciprocal space maps demonstrate the good crystal quality of the cubic (Al, Ga)N/GaN films. The measured Raman shift of the TO phonon mode of the AlyGa1−yN alloy is in good agreement with theoretical calculations. © 2001 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1345858