Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
58 (1991), S. 1042-1043
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Wedge-shaped field emitters may have some advantages over conical tip emitters as electron sources in vacuum microelectronic devices. A method has been developed to make atomically sharp wedge-shaped silicon through use of dry etching and dry oxidation. Transmission electron microscopy studies show that silicon wedge emitters can be made with wedge radius and angle at 1 nm and 60°, respectively, by repeated oxidation in oxygen at 950 °C.〈lz〉 〈lz〉 〈lz〉
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.104417
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