Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
78 (2001), S. 4031-4033
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm. © 2001 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1380398
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