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Wet-etched diffractive lenses for hard X-rays (2001)

David, Christian ; Ziegler, Eric ; Nöhammer, Bernd

Chester : International Union of Crystallography (IUCr)

Journal of synchrotron radiation 8 (2001), S. 1054-1055

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ISSN: 1600-5775

Source: Crystallography Journals Online : IUCR Backfile Archive 1948-2001

Topics: Geosciences , Physics

Notes: A method for the fabrication of linear transmission Fresnel zone plates for X-rays in the 8–15 keV photon energy range is presented. The diffractive elements are generated by electron-beam lithography and chemical wet etching of 〈110〉-oriented silicon membrane substrates. Diffractive structures with aspect ratios of more than 30 for 300 nm-wide structures were obtained. The diffraction efficiency of such a lens was measured for 13.3 keV radiation to be 20%.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1107/S0909049501002746

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