ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract The Louisiana State University (LSU) Microsystems Engineering Team (μSET) is developing techniques for producing microstructures with predictable 3-D geometry. One approach is based on controlled anodic dissolution of electroplated structures to obtain desired shapes. A finite element model was developed to predict the resulting shapes. As a demonstration of the shaping process, development of LIGA-based scanning probe microscope tips was investigated. An array of micro-posts 1.8 micrometers in diameter and 12 micrometers high was produced using x-ray lithography and subsequent electrodeposition. The posts were sharpened electrochemically. Other geometries are being investigated.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s005420050040
