ISSN:
1432-1130
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract. Depth profiling of iron impurities on GaAs surfaces is performed by means of total reflection X-ray fluorescence. A numerical processing procedure presented previously is used for the evaluation of the experimental data. A detection limit of 1011 atoms Fe/cm2 on GaAs surfaces has been achieved.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/PL00012719