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  • 1
    Electronic Resource
    Electronic Resource
    LSI-Entwicklung und -Fabrikation (1981)
    Springer
    Naturwissenschaften 68 (1981), S. 513-518 
    Details
    ISSN: 1432-1904
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Chemistry and Pharmacology , Natural Sciences in General
    Notes: Abstract After a brief historical review, the key elements of LSI silicon technology are described, using illustrative examples. Superintegration as well as its limits are discussed. The manufacturing process of a superintegrated 64k-bit memory chip shows the essential issues of a modern high-volume production. An outlook exhibits possible developments even in non-silicon technologies.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00365375
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