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Electropolishing of silicon using hydrazine (1997)

SUNDARAM, K. B ; DESAI, V. H

Springer

Journal of materials science 8 (1997), S. 99-101

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ISSN: 1573-482X

Source: Springer Online Journal Archives 1860-2000

Topics: Electrical Engineering, Measurement and Control Technology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics

Notes: Abstract A new electropolishing technique has been investigated for polishing silicon using aqueous hydrazine. p-Type silicon samples are electropolished using this technique and the optimum experimental condition required to achieve this is suggested.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1023/A:1018521524681

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