ISSN:
0392-6737
Keywords:
Impact phenomena (including electron spectra and sputtering)
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Summary Neumann's expansion of the integral form of the Boltzmann transport equation is used to estimate the contribution of different generations of recoils to sputtering. By considering the flux generated by backscattered ions it is shown that primary recoils are, in the region of low energy (few keV), the main contribution to sputtering.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF02452004