ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au-Al multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to gold, the depth resolution of the aluminium distributions is limited even when the signals are in a background-free region of the spectrum. In addition, the aluminium depth profiles were measured using the resonant nuclear reaction 27Al(p, γ)28Si at 992 keV with a high depth resolution of 5 nm at the specimen surface. High-energy backscattering spectroscopy with 7.6 MeV 4He ions was used to investigate light element contaminantions (depth resolved), e.g. oxygen, at the specimen surface, the Au-Al interfaces and at the Au/C interface.
Additional Material:
9 Ill.
Type of Medium:
Electronic Resource
