ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Experimental data confirm the utility of the following simple equation in predicting the spin coating behavior of polyimide precursor solutions: \documentclass{article}\pagestyle{empty}\begin{document}$$ {\rm h} = {\rm c\beta }_{\rm 0} {\rm k}^{{\rm \beta }_{\rm 1} } {\rm \omega }^{{\rm \beta }_{\rm 2} } {\rm t}^{{\rm \beta }_{\rm 3} } \quad\quad\quad\quad{\rm (1)} $$\end{document} in which \documentclass{article}\pagestyle{empty}\begin{document}$$ \begin{array}{*{20}c} {c = {\rm polymer\, solution\, solid\, weight\, fraction;}} \\ {\beta _i = {\rm fitted\, coefficient\, (Greek\, letter\, beta)};} \\ \quad{h = {\rm film\, thickness\, after\, cure\, or\, solvent\, removal};} \\ \quad{k = {\rm polymer\, solution\, kinematic\, viscosity, centistokes};} \\ {t = {\rm time},{\rm and;}} \\ \quad{\omega = {\rm wafer\, spin\, speed, rpm (Greek\, letter\, omega)}.} \\ \end{array} $$\end{document}.
Additional Material:
8 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760331507
