ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
In our current work, we have examined the e-beam sensitivity and thermal processing behavior of pure PBOCST [poly(tert-butoxycarbonyloxystyrene)]. An alkali soluble latent image can be generated in the PBOCST by e-beam exposure followed by a post-exposure bake (PEB) at relatively high temperatures (140 to 150°C). Pattern wet development operates on the same basis as a PBOCST/acid generator two component system. Deprotection, accelerated by the exposure, yields alkali soluble areas, while unexposed areas remain insoluble. Sensitivities of 5 to 10°C/cm2 and contrasts of 6 to 10 have been measured. Complete TBOC deprotection results in a film thickness loss of 35 to 40% as CO2 and isobutene are evolved. A laser interferometer/hotplate setup was used to track film thickness with time during the thermal deprotection process. IR analysis confirmed the correlation between conversion and thickness. It was found that a slow initial conversion rate was followed an exponentially steep rise in rate after 50% conversion. Activation energies were on the order of 30 kcal/mol. It was concluded that thermolysis in both exposed and unexposed resist occurred during the PEB, but that the difference in extent of conversion on exposure was sufficient to generate a pattern.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760322108
