Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
55 (1989), S. 783-785
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The microstructure of hydrogenated amorphous silicon-carbon alloys has been analyzed by small-angle x-ray scattering, infrared absorption, and density measurements. Decreasing density with C incorporation is due to microvoids about 0.6 nm in average radius, which are either approximately spherical in shape or randomly oriented nonspheres. The microvoid number density increases from about 5×1019/cm3 for a-Si:H to about 4×1020/cm3 for a-Si0.7 C0.3 :H. The CH3 species probably causes the enhanced microvoid formation in these alloys. A large fraction of the microvoid surfaces is not hydrogenated.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.101779
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