Unknown
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2018-03-13
Description:
This paper presents a behavioral modeling technique for CMOS microelectromechanical systems (MEMS) microresonators that enables simulation of an MEMS resonator model in Analog Hardware Description Language format within a system-level circuit simulation. A 100-kHz CMOS-MEMS resonant pressure sensor has been modeled into Verilog-A code and successfully simulated within Cadence framework. Analysis has shown that simulation results of the reported model are in agreement with the device characterization results. As an application of the proposed methodology, simulation and results of the model together with an integrated monolithic low-noise amplifier is exemplified for detecting the position change of the resonator.
Print ISSN:
1530-437X
Electronic ISSN:
1558-1748
Topics:
Electrical Engineering, Measurement and Control Technology
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