ISSN:
1057-9257
Keywords:
precursor
;
MOCVD
;
vapour pressure
;
adduct
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
The vapour pressures of mixtures of dimethylzinc with triethylamine (1), 1,3,5-trimethyl- (2) and 1,3,5-triethylhexahydro-1,3,5-triazine (3) have been studied using static measurement at various mole ratios of ligand to alkyl at 0°C. The results obtained are useful in assessing the suitability of these compounds as precursors for the deposition of group-12-containing materials by MOCVD. © 1997 John Wiley & Sons, Ltd.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
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