ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
Filter
  • Articles  (26)
  • 42.60  (26)
  • 2020-2022
  • 1985-1989  (26)
  • 1970-1974
  • 1950-1954
  • 1945-1949
  • Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics  (26)
  • Economics
Collection
  • Articles  (26)
Source
Keywords
Publisher
Years
Year
Topic
  • Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics  (26)
  • Economics
  • Physics  (115)
  • 1
    Electronic Resource
    Electronic Resource
    Temperature effects in the photolytic LCVD of platinum (1989)
    Springer
    Applied physics 49 (1989), S. 189-197 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 81.10 ; 82.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The photolytic laser chemical vapor deposition (LCVD) rate of platinum from its bishexafluoroacetylacetonate precurser has been measured in situ and in real time. Optical transmission of the 350 nm photolysis light through the deposited platinum film and a transparent glass substrate is monitored and analysed in detail. From these measurements, as well as measurements of the reflected light, the fraction of the laser beam power absorbed in the metal film is found. The latter allows a simple estimate of the laser-induced temperature rise at the metal surface. It is shown that even rather small temperature increases of the order of several tens of degrees centigrade can completely change the photolysis mechanism and hence drastically influence the photolytic LCVD rate. A simple modification of Lax's model, in which a temperature dependent thermal conductivity of the substrate is introduced, is used to describe the laser-induced heating of a strongly absorbing thin metal film on a glass substrate.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616298
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Laser-induced formation and surface processing of High-Temperature superconductors (1989)
    Springer
    Applied physics 48 (1989), S. 527-541 
    Details
    ISSN: 1432-0630
    Keywords: 74.70 ; 42.60 ; 81.10
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The use of lasers in the formation and surface processing of high-temperature superconductors (HTS) is reviewed. Presently, thin film fabrication by reactive laser sputtering, and surface patterning by laser-induced reduction/metallization and ablation are the most promising applications. The great majority of the investigations have been performed for Y-Ba-Cu-O.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617854
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 3
    Electronic Resource
    Electronic Resource
    Temperature measurement during laser heating of thin films using a temperature-sensitive phosphor (1989)
    Springer
    Applied physics 48 (1989), S. 273-276 
    Details
    ISSN: 1432-0630
    Keywords: 07.20 ; 42.60 ; 44.50 ; 78.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A phosphor with temperature-dependent lifetime has been used to measure the temperature distribution produced by laser heating of a thin film surface. A gold thin film deposited on a quartz substrate is coated with ∼40 μm film of the phosphor material. A cw argon ion laser (476 nm) beam is split into two beams, with the more intense beam focused to 15 μm (1/e2 radius) to heat the film through the quartz substrate. The weaker probe beam is chopped and focused tightly using a microscope objective to excite the phosphor from the other side. The spatial variation in lifetime, and hence the temperature distribution, is obtained by scanning the probe beam over the heated region. The temperature distribution measured for different film thickness's is compared with calculations using a finite element model. The calculated temperatures at the gold surface near the laser beam are higher than the experimentally measured values, and agree only when the heat-sinking effect of the phosphor material is taken into account. The results suggest that a phosphor layer thinner than a micron will be required (for 15 μm laser spot size) so as not to perturb the temperature of the gold layer.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00619397
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 4
    Electronic Resource
    Electronic Resource
    In situ preparation of Bi-Sr-Ca-Cu-O superconducting films by laser sputtering (1989)
    Springer
    Applied physics 49 (1989), S. 221-223 
    Details
    ISSN: 1432-0630
    Keywords: 74.70 ; 42.60 ; 81.10
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Superconducting films of Bi-Sr-Ca-Cu-O on (100) MgO substrates have been fabricated by XeCl-excimer-laser sputtering from ceramic targets of Bi2.5Sr2Ca2Cu3Oy in O2 atmosphere. The films were polycrystalline with the c-axis (30.80±0.02Å) preferably oriented normal to the substrate surface. Without post-annealing the films showed metallic resistance behavior with zero resistance temperatures of up to Tc(0) }- 79 K. The critical current density of the films had values of up to jc(50K)}- 104 A/cm2.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616303
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 5
    Electronic Resource
    Electronic Resource
    Negative thermal feedback in laser-assisted oxidation of thin Zn films (1988)
    Springer
    Applied physics 47 (1988), S. 313-316 
    Details
    ISSN: 1432-0630
    Keywords: 81.60 ; 82.65 ; 42.60
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The processes leading to the control of the lateral dimension of laser-assisted oxidation of Zn films on glass are examined. It is shown that it is determined by negative feedback between temperature and optical absorption.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00615938
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 6
    Electronic Resource
    Electronic Resource
    Laser-induced chemical etching of silicon in chlorine atmosphere (1988)
    Springer
    Applied physics 47 (1988), S. 377-386 
    Details
    ISSN: 1432-0630
    Keywords: 81.60 ; 82.65 ; 42.60
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Laser-induced chemical etching of (100) Si in Cl2 atmosphere has been investigated using a combined laser-beam irradiation scheme. 308 nm XeCl excimer laser radiation at parallel incidence has been used to exclusively generate Cl atoms in the gas phase above the Si surface. Additionally, 647.1 nm Kr+ laser radiation at perpendicular incidence has been used to exclusively generate photocarriers within the Si surface. The Cl atom concentration was determined — independently — from both the observed chemiluminescence following the Cl-Cl atom recombination, and from numerical calculations. The etch rateW observed on the Si surface was found to be directly proportional to the Cl atom concentration in the gas phase, and it increases sublinearly with the Kr+ laser powerP according toW∞P 0.7.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00615502
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 7
    Electronic Resource
    Electronic Resource
    Ultraviolet laser ablation and etching of polymethyl methacrylate sensitized with an organic dopant (1988)
    Springer
    Applied physics 45 (1988), S. 289-292 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 82.65 ; 73.40
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Although polymethyl methacrylate (PMMA) is essentially transparent to light of 308 or 351 nm, it can be made sensitive to photoablation and etching by excimer laser pulses (20 ns half-width) of those wavelengths by the introduction of an organic dopant. The dopant (trade name=Tinuvin*) is actually a quencher of the first electronic excited state of PMMA and is therefore used commercially to stabilize the polymer against photodegradation. Laser etching of Tinuvin-doped PMMA can be shown to be a photochemical process in which the Tinuvin decomposes by the absorption of two or more photons and causes the ablation of the surrounding polymer.*[2-(2′-hydroxy-3′,5′-diisopentyl-phenyl) benzotriazole].
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617933
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 8
    Electronic Resource
    Electronic Resource
    248 nm laser etching of GaAs in chlorine and ozone gas environments (1988)
    Springer
    Applied physics 45 (1988), S. 301-304 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 82.50N ; 85.30
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract KrF laser etching of GaAs in Cl2 and O3 gas ambients by direct laser illumination is reported. The etch depth per pulse in Cl2 was found to be linear versus the laser fluence on the sample in the 0.2–1.1 J/cm2 range. It increased as a function of the Cl2 pressure up to 6 Torr and slightly decreased for pressures above this value. It also decreased as a function of the laser repetition rate. Very smoothly etched surfaces were obtained after irradiation using the Cl2 and O3 etching gases. Auger analysis of the etched GaAs surfaces shows almost no traces of chlorine after etching in Cl2, whereas a thick oxide layer of about 1500 Å thickness was found after etching in ozone.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617935
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 9
    Electronic Resource
    Electronic Resource
    Laser-induced chemical etching of silicon in chlorine atmosphere (1988)
    Springer
    Applied physics 45 (1988), S. 293-299 
    Details
    ISSN: 1432-0630
    Keywords: 81.60 ; 82.65 ; 42.60
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Laser-induced chemical etching of single-crystalline (100) Si in Cl2 atmosphere has been investigated for continuous Ar+ and Kr+ laser irradiation at around 351 nm, and at 457.9, 488.0, 514.5, and 647.1 nm. For laser irradiances below 105 W/cm2 the etching mechanism is non-thermal, and is based on photo-generated electron-hole pairs within the Si surface and Cl atoms produced within the gas phase. The experimental results are compared with model calculations.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617934
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 10
    Electronic Resource
    Electronic Resource
    Direct laser writing of superconducting patterns into semiconducting ceramic Y-Ba-Cu-O (1988)
    Springer
    Applied physics 46 (1988), S. 331-334 
    Details
    ISSN: 1432-0630
    Keywords: 74.70V ; 42.60 ; 82.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Investigations on the laser-induced oxidation of YBa2Cu3O6 are presented. Here, the oxygen content of the material is locally increased by laser-induced heating under cw Ar+ or Kr+ laser irradiation in 02 atmosphere. The technique permits direct-writing of superconducting patterns into the semiconducting sample surface.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01210354
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 11
    Electronic Resource
    Electronic Resource
    Searching for optimum conditions in the laser writing of small ohmic contacts (1988)
    Springer
    Applied physics 46 (1988), S. 285-290 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 81.10 ; 85.40
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Microscopic ohmic contacts are made by laser chemical vapor deposition of platinum on a Pyrex substrate. The electrical conductivity of the deposited metal stripes is measured as a function of the laser power, the writing speed, and the organometallic vapor pressure. The latter appears to be the key parameter for producing contacts with low resistance at high writing speeds. Even on these transparent substrates there is no apparent advantage in using light at 350 nm, where photolysis may in principle play a significant role, over using visible light where photolysis is not effective.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01141594
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 12
    Electronic Resource
    Electronic Resource
    Direct laser writing of superconducting patterns into semiconducting ceramic Y-Ba-Cu-O (1988)
    Springer
    Applied physics 46 (1988), S. 331-334 
    Details
    ISSN: 1432-0630
    Keywords: 74.70V ; 42.60 ; 82.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Investigations on the laser-induced oxidation of YBa2Cu3O6 are presented. Here, the oxygen content of the material is locally increased by laser-induced heating under cw Ar+ or Kr+ laser irradiation in O2 atmosphere. The technique permits direct-writing of superconducting patterns into the semiconducting sample surface.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01141600
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 13
    Electronic Resource
    Electronic Resource
    Laser-induced surface reduction of the high-T c superconductor YBa2Cu3O7−x (1988)
    Springer
    Applied physics 45 (1988), S. 313-316 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 74 ; 82.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The first investigations on the laser-induced reduction of YBa2Cu3O7−x are presented. Here, the oxygen content of the material is diminished by local heating under cw Kr+ laser irradiation in H2 atmosphere. The technique permits the superconducting properties of the material to be locally changed or destroyed. Laser-induced surface metallization may be useful for the electroding of such materials.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617937
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 14
    Electronic Resource
    Electronic Resource
    Diamond-like carbon films prepared by pulsed-laser evaporation (1988)
    Springer
    Applied physics 45 (1988), S. 355-360 
    Details
    ISSN: 1432-0630
    Keywords: 81.10 ; 68.55 ; 42.60
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Diamond-like carbon thin films were prepared by pulsed-laser evaporation. In this method a carbon target was irradiated by a XeCl laser with a power density of 3×108 W/cm2 and carbon atoms, together with a small number of ions, were produced. Deposition rates and film properties changed sensitively with substrate temperature. The films deposited at 50°C were diamond-like, having reasonable hardness, high refractive index (2.1–2.2 at 633 nm), optical transparency in the infrared, electrical resistivity of 108 Ω cm and chemical inertness (no dissolution in a HF∶HNO3 solution). The band gap measured from optical absorption was 1.4 eV. Raman spectrum and infrared absorption, whose features varied with the substrate temperature, were also measured. The films were amorphous and no crystallinity was observed, as confirmed by x-ray diffraction, transmission electron diffraction and Raman spectroscopy. Hydrogen atoms were incorporated in the films with a typical H/C ratio of 0.3. The application of a negative bias to the substrate modified the deposition due to the presence of ions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617942
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 15
    Electronic Resource
    Electronic Resource
    Gas phase versus surface contributions to photolytic laser chemical vapor deposition rates (1988)
    Springer
    Applied physics 45 (1988), S. 337-343 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 81.10 ; 82.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The rate of cwphotolytic laser chemical vapor deposition (LCVD) of platinum is measured for λ≈350 nm as a function of the light intensity and the metalorganic vapor pressure. The growth of the metal films is studied in situ and in real time by monitoring their optical transmission. At low intensities the transmitted light decreases monotonically with time, and the LCVD process is photolytic with its rate limiting step in the surface adlayer. At higher intensities we observe two distinct time domains: Relatively slow initial photolytic deposition with its rate limiting step in the gas phase, which is followed by much faster pyrolytic LCVD. An improved method for distinguishing between adlayer and gas-phase limiting processes is demonstrated. These observations are confirmed by studying the photolytic deposition rates while varying the thickness of the adlayer.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617940
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 16
    Electronic Resource
    Electronic Resource
    Excimer-laser-induced ablation of the high-T c superconductor Bi-Ca-Sr-Cu-O (1988)
    Springer
    Applied physics 47 (1988), S. 103-104 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 74 ; 82.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The ablation of ceramic Bi-Ca-Sr-Cu-O by XeCl-excimer-laser projection has been investigated. In both air and vacuum, etching commences at about 2.4 J/cm2 and then increases with fluence within the regime investigated (Φ 〈) 20 J/cm2). At 10 J/cm2 the respective etch rates are around 1 μm/pulse and 1.6 μm/pulse.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00619707
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 17
    Electronic Resource
    Electronic Resource
    Searching for optimum conditions in the laser writing of small ohmic contacts (1988)
    Springer
    Applied physics 46 (1988), S. 285-290 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 81.10 ; 85.40
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Microscopic ohmic contacts are made by laser chemical vapor deposition of platinum on a Pyrex substrate. The electrical conductivity of the deposited metal stripes is measured as a function of the laser power, the writing speed, and the organometallic vapor pressure. The latter appears to be the key parameter for producing contacts with low resistance at high writing speeds. Even on these transparent substrates there is no apparent advantage in using light at 350 nm, where photolysis may in principle play a significant role, over using visible light where photolysis is not effective.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01210348
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 18
    Electronic Resource
    Electronic Resource
    Laser-induced chemical etching of silicon in chlorine atmosphere (1988)
    Springer
    Applied physics 47 (1988), S. 377-386 
    Details
    ISSN: 1432-0630
    Keywords: 81.60 ; 82.65 ; 42.60
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Laser-induced chemical etching of (100) Si in Cl2 atmosphere has been investigated using a combined laser-beam irradiation scheme. 308 nm XeCl excimer laser radiation at parallel incidence has been used to exclusively generate Cl atoms in the gas phase above the Si surface. Additionally, 647.1 nm Kr+ laser radiation at perpendicular incidence has been used to exclusively generate photocarriers within the Si surface. The Cl atom concentration was determined — independently — from both the observed chemiluminescence following the Cl-Cl atom recombination, and from numerical calculations. The etch rateW observed on the Si surface was found to be directly proportional to the Cl atom concentration in the gas phase, and it increases sublinearly with the Kr+ laser powerP according toW∞P 0.7.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00615502
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 19
    Electronic Resource
    Electronic Resource
    Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum (1987)
    Springer
    Applied physics 44 (1987), S. 353-359 
    Details
    ISSN: 1432-0630
    Keywords: 81.10 ; 85.40 ; 42.60
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The laser chemical vapor deposition of platinum from its bishexafluoroacetylacetonate derivative is studied with a cw argon ion laser at 458 and 514 nm. The height, the width, as well as the electrical conductivity of the deposited stripes are reported as a function of the vapor pressure of the metalorganic precurser, the laser intensity, and the writing speed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00624603
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 20
    Electronic Resource
    Electronic Resource
    Laser-induced chemical etching of silicon in chlorine atmosphere (1987)
    Springer
    Applied physics 43 (1987), S. 227-232 
    Details
    ISSN: 1432-0630
    Keywords: 81.60 ; 82.65 ; 42.60
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Chemical etching of single-crystalline (100)Si induced by pulsed laser irradiation at 308, 423, and 583 nm has been investigated as a function of the laser fluence and C12 pressure. Without laser-induced surface melting, etching requires Cl radicals which are produced only at laser wavelengths below 500 nm. With low laser fluences (Φ(308 nm)〈100 mJ/cm2) etching is non-thermal and based on direct interactions between photocarriers and Cl radicals. For fluences which induce surface melting (Φ(308 nm)〉440 mJ/cm2) etching is thermally activated. In the intermediate region both thermal and non-thermal mechanisms contribute to the etch rate.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00615982
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 21
    Electronic Resource
    Electronic Resource
    Laser-induced chemical etching of ceramic PbTi1−xZrxO3 (1986)
    Springer
    Applied physics 40 (1986), S. 235-239 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 81.30 ; 82.65
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The laser-induced etching of ceramic PbTi1−xZrxO3 in a hydrogen atmosphere and in air has been investigated. Visible Ar+ and Kr+ laser radiation was employed in most of the experiments. In H2 atmosphere, regular patterning of the ceramic is possible. Average etch rates reach up to about 250 μm/s.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616600
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 22
    Electronic Resource
    Electronic Resource
    Study of the compounds formed on damaged ZnSe windows by multi-pulse microsecond pulsed TEA-CO2 laser irradiation in air (1986)
    Springer
    Applied physics 40 (1986), S. 227-233 
    Details
    ISSN: 1432-0630
    Keywords: 42.70 ; 42.60 ; 61.80 ; 68.20
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract We report on experimental data of chemical compounds formed in the damaged area at the surface of certain optical ZnSe windows subjected to multi-pulse microsecond pulsed TEA-CO2 laser irradiation in air. The results are analysed from the viewpoint of implication of the oxidation process activated under the action of CO2-laser power in plasma initiation and evolution of surface damage process.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616599
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 23
    Electronic Resource
    Electronic Resource
    Explosive crystallization processes in silicon (1986)
    Springer
    Applied physics 40 (1986), S. 29-36 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 64 ; 68.20 ; 81.10
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract This paper deals with selfsustaining crystallization processes, the so-called explosive crystallization, in silicon produced by short temperature pulses. By this, crystalline Si layers can be generated on amorphous substrates, e.g. on SiO2, at which liquid and solid-state crystallization processes can take place. Emphasis will be given to the liquid-phase explosive crystallization processes. Here, the transformation of amorphous into crystalline silicon occurs through two coupled laterally moving interfaces, amorphous-liquid and liquid-crystalline. Using an experimental equipment existing of 3 synchronized lasers supplying the temperature pulse for the ignition, the spreading out and stopping of the laterally moving interfaces, in connection with time-resolved measurements of the reflectivity by a laser test beam, information about the characteristic parameters as the velocity of the process, the crystallized area and the course of the crystallization front will be obtained. The crystalline structure was investigated by optical and transmission-electron micrography. The main results are: the crystallization fronts move radially from the ignition point with a velocity of about 15 m/s, crystalline laminae grow preferentially in 〈110〉 direction over a distance of more than 100 μm, areas of some millimeters in diameter can be crystallized and the quality of the crystallized layers essentially depends on the “amorphousness” of the virgin layer and the preparation method. The experimental results are in good agreement with theoretical predictions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616588
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 24
    Electronic Resource
    Electronic Resource
    Laser-induced surface metallization of ceramic PLZT (1986)
    Springer
    Applied physics 41 (1986), S. 331-334 
    Details
    ISSN: 1432-0630
    Keywords: 82.65 ; 42.60 ; 81.30
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Hot pressed, optically transparent ferroelectric ceramics of lanthanum modified lead zirconate titanate (PLZT) have been locally reduced and metallized by means of ultraviolet Kr+ laser irradiation in a hydrogen atmosphere. The technique allows maskless single-step metallic patterning of the material.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616056
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 25
    Electronic Resource
    Electronic Resource
    Theoretical and experimental investigations on the deposition rate and processes of parallel incident laser-induced CVD (1985)
    Springer
    Applied physics 38 (1985), S. 221-226 
    Details
    ISSN: 1432-0630
    Keywords: 68.55 ; 42.60 ; 82.50
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A theoretical analysis of and experimental observations on a parallel incident laser-induced deposition rate are reported. Our theory predicts that the maximum deposition rate depends on the photo-traveling length, the scattering cross section of the reactant gases and their partial pressure. This result is applied to SiO2 deposition using monosilane and nitrous oxide for reactant gases, and is compared with experimental results. We show that the deposition rate of SiO2 films as a function of the incident light power and the partial pressure of reactant gases predicted by the present theory well explains our experimental results. A supply-limitation phenomenon of the reactant gases and a method of estimating deposition efficiencies are also discussed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616500
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 26
    Electronic Resource
    Electronic Resource
    Experimental study of laser induced decomposition based processing of a brittle plastic, CR-39 (allyl diglycol carbonate) (1985)
    Springer
    Applied physics 36 (1985), S. 19-25 
    Details
    ISSN: 1432-0630
    Keywords: 42.60 ; 61.40
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A cw CO2 laser, coupled with an astigmatism free beam focussing mirrors arrangement is used for processing a brittle plastic, CR-39 without producing cracks, vents or chips. The processing is based on the formation of volatile products of laser-induced decomposition in the plastic. Threshold fluence for the decomposition (found to be independent of the power density and beam residence time) in CR-39 atλ=10.6μm is determined to be 25 J cm−2 and the decomposition threshold power density for cw irradiation 2.1±0.5 W cm−2. The depth and width of the tapered laser processed region are observed to increase with power density and beam residence time. The widths attain a steady state value of ∼ 1 mm at beam residence time above 65 ms, for a fixed power density (2.5×104 W cm−2) and sheet thickness (250 μm). Taper angle of the edges decreases with increasing power density and/or beam residence time. The heat affected zone (measured in crossed polarisers) around the processed region is found to extend with increasing beam residence time but remains unaffected on changing power density. The results are discussed in terms of the optical and thermophysical properties of CR-39 and the parameters of the interacting laser beam.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616455
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...