ISSN:
1572-8986
Keywords:
“Cold” plasmas
;
plasma diagnostics
;
concentration of species
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract Diagnostic techniques for low-pressure, “cold” plasmas have mostly been limited to emission and mass spectrometry. Herein, the techniques of gas-phase electron paramagnetic resonance and laser-induced fluorescence spectroscopy are briefly reviewed. Particular attention is paid to their attributes which make them good candidates for plasma diagnostic tools. It is found that gas-phase electron paramagnetic resonance can be used to determine and monitor the absolute concentration of a number of important plasma species, e.g., free radicals and atoms. Laser-induced fluorescence can also monitor, with even more sensitivity, but perhaps not so well absolutely, the concentrations of many plasma species, e.g., free radicals, metastable excited states, and molecular ions.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00566372
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