Call number:
11/M 05.0569
Description / Table of Contents:
Contents: The Focused Ion Beam Instrument. Ion,Solid Interactions. Focused Ion Beam Gases for Deposition and Enhanced Etch. Three-Dimensional Nanofabrication Using Focused Ion Beams. Device Edits and Modifications. The Uses of Dual Beam FIB in Microelectronic Failure Analysis. High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy. FIB for Materials Science Applications. Practical Aspects of FIB TEM Specimen Preparation. FIB LiftOut Specimen Preparation Techniques. A FIB MicroSampling Technique and a Site Specific TEM Specimen Preparation Method. DualBeam (FIBSEM) Systems. Focused Ion Beam Secondary Ion Mass Spectrometry (FIBSIMS). Quantitative Three Dimensional Analysis Using Focused Ion Beam Microscopy. Applications of FIB in Combination with Auger Electron Spectroscopy.
Type of Medium:
Monograph available for loan
Pages:
xiv, 357 S.
,
Ill., graph. Darst.
ISBN:
0387231161
Classification:
Geochemistry
Location:
Reading room
Branch Library:
GFZ Library
Permalink
