Photolytic Carbon Deposition by IR-Multiphoton Dissociation of Molecules

CO₂ laser induced decomposition of 3-butyn-2-one in the gas phase results in the deposition of carbonaceous films composed of a graphitic and monohydrogenated carbon, in which H is dominantly bonded to sp3 sites. The films incorporate oxygen in superficial layers. The technique is suitable for preparation of thin C-based films at low substrate temperatures.