Theoretical and experimental studies of N(E) spectra in auger electron spectroscopy
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Cited by (20)
Determination of electron backscattering coefficient of beryllium by a high-precision Monte Carlo simulation
2021, Nuclear Materials and EnergyCitation Excerpt :The systematically developed Monte Carlo simulation models and methods by Ding’s group (DingMC) in different approaches for applications to electron spectroscopies and electron microscopies are comprised of two categories: 1. Classical trajectory Monte Carlo (CTMC) simulations, where the simulation of electron elastic and inelastic scattering in amorphous-like surfaces/solids/thin-films are treated by conventional Monte Carlo sampling techniques from respective scattering cross sections, including (a) CTMC-SEM, simulation of secondary electrons and backscattered electrons emitted from bulk solids as signals in scanning electron microscopy and background in Auger electron spectroscopy [21–38]; (b) CTMC-3DSEM, simulation for complex 3D sample geometries particularly for critical dimension scanning electron microscopic imaging [39–49]; [c] CTMC-EPMA, simulation of continuous and characteristic X-ray signals in electron probe microanalysis [50–52]; (d) CTMC-SES, simulation of Auger electron and/or X-ray photoelectron signals in surface electron spectroscopies [53–56]; (e) CTMC-REELS, simulation of electron elastic peak spectroscopy and reflection electron energy loss spectroscopic spectrum from surfaces [57–66]; (f) CTMC-RMC, a reverse Monte Carlo method for deriving optical constants of solids from reflection electron energy loss spectroscopy spectra [67–73]; (g) CTMC-CHARG, simulation of specimen charging phenomena in insulators and semiconductors [74–78]; (h) CTMC-ATOMIC, simulation for atomic thin layers with substrate [63,66] or without substrate, like graphene, particularly for deriving electron inelastic scattering mean free path [79–81]; 2. Quantum trajectory Monte Carlo (QTMC) simulation for crystalline materials, which combines the simulation of Bohmian quantum trajectories for electron elastic scattering/diffraction [82–84] with the Monte Carlo sampling of electron inelastic scattering: QTMC-ARSEI, for atomic resolution secondary electron imaging in scanning transmission electron microscopy [85–87].
Interaction of Ions and Electrons with Solid Surfaces
2006, Materials Surface Processing by Directed Energy TechniquesElectron-Beam-Induced Nanometer-Scale Deposition
2006, Advances in Imaging and Electron PhysicsMonte Carlo simulation studies in Japan on interaction of charged particles with solids during those early days in 1960s-1970s
2005, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsIntrinsic Auger signal profiles derived by Monte Carlo analysis
1996, Applied Surface Science
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Permanent address: Fundamental Physics Center, China University of Science and Technology, Hefei, Anhui, People's Rep. of China.