Elsevier

Applied Surface Science

Volume 46, Issues 1–4, 2 December 1990, Pages 430-434
Applied Surface Science

Glass surface treatment with excimer and CO2 lasers

https://doi.org/10.1016/0169-4332(90)90184-2Get rights and content

Abstract

Laser techniques were used for ablation and surface modification of glass. The experiments were carried out using a 50 W CO2 laser (10.6 μm) and a 40 W 2J/20 Hz XeCl excimer laser (308 nm). The IR radiation heats the sample surface locally. Lead glass was polished and vitreous silica was engraved. High power UV radiation causes ablation of glass with negligible thermal effects. This phenomenon is discussed on the basis of a photochemical mechanism. Removal rates of various glasses were determined.

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